Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5361801 | Applied Surface Science | 2011 | 5 Pages |
Abstract
⺠A novel inorganic-organic hybrid material of the (-Ti-N-C6H4-O-C6H4-N-)n type is reported. ⺠The new hybrid material is grown layer-by-layer with an ALD-type process. ⺠Hybrid films deposited at 250-490 °C are stable in atmospheric conditions. ⺠Films grown at higher temperatures are more stable than those grown at lower temperatures. ⺠The growth rate increases with increasing temperature.
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Authors
Anjali Sood, Pia Sundberg, Jari Malm, Maarit Karppinen,