Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5361811 | Applied Surface Science | 2011 | 5 Pages |
Abstract
⺠GZO thin films were deposited by PLD with the various Ga doping. ⺠The carrier concentration and oxygen vacancies in the GZO thin films increased with an increase of Ga doping. ⺠The 3.0% Ga doped thin film exhibited the lowest resistivity as low as 3.63 Ã 10â4 Ω cm. ⺠The lower barrier height of grain boundaries would cause the lower resistivity.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Chang-Feng Yu, Sy-Hann Chen, Shih-Jye Sun, Hsiung Chou,