| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5361828 | Applied Surface Science | 2011 | 6 Pages |
Abstract
⺠The research results on fine lines show the relations between the quality of copper metallization and laser wavelengths, energy density, repetition rate and repetition. ⺠Metallic aluminium produced by decomposition of AlN on local laser irradiated surfaces is proven with the XPS data and is seen to be the electron supplier and catalyzing center for electrochemical reactions in electroless copper bath. ⺠Blind, through-hole and V-shaped micro via-holes show depth-dependent activation and metallization.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Kam Cheun Yung, Cong Chen, Chung Pang Lee,