Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5361850 | Applied Surface Science | 2011 | 5 Pages |
Abstract
⺠The films were fabricated by radio frequency magnetron sputtering technique. ⺠A novel two-steps rapid thermal annealing approach was demonstrated. ⺠Microstructure plays an important role in enhanced ferroelectric properties. ⺠Two-steps rapid thermal annealing could be potential for ferroelectric films.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Xuedong Li, Hongli Guo, Hong Liu, Dingquan Xiao, Jianguo Zhu,