Article ID Journal Published Year Pages File Type
5361850 Applied Surface Science 2011 5 Pages PDF
Abstract
► The films were fabricated by radio frequency magnetron sputtering technique. ► A novel two-steps rapid thermal annealing approach was demonstrated. ► Microstructure plays an important role in enhanced ferroelectric properties. ► Two-steps rapid thermal annealing could be potential for ferroelectric films.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Authors
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