| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5361862 | Applied Surface Science | 2011 | 4 Pages |
Abstract
⺠High aspect ratio nano-replication onto the surface of glass and of semiconductor. ⺠Nanoimprinting less than 100 nm pitch structures on the surface of glass and of semiconductor. ⺠Nano-replicated high refractive index semiconductor glass for application in photonic crystals, sub-microelectronic chips and moth eye structures.
Related Topics
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Physical and Theoretical Chemistry
Authors
M. Silvennoinen, K. Paivasaari, J.J.J. Kaakkunen, V.K. Tikhomirov, A. Lehmuskero, P. Vahimaa, V.V. Moshchalkov,