Article ID Journal Published Year Pages File Type
5361877 Applied Surface Science 2011 5 Pages PDF
Abstract
► The effect of deposition temperature on structural and optical properties of one of the poly types that is rarely reported in literature i.e. 8H-SiC is represented in this article. ► The details of synthesis of SiC films by reactive magnetron sputtering technique are discussed. ► The structural and optical characterization is focused in detail.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Synthesis and characterization of porous crystalline SiC thin films prepared by radio frequency reactive magnetron sputtering technique
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