Article ID Journal Published Year Pages File Type
5362117 Applied Surface Science 2012 7 Pages PDF
Abstract
► Power dependency of secondary ion yield on sputtering yield. ► Yield enhancement per primary ion constituent decreases with increasing cluster size. ► Prediction of secondary ion yield enhancement as a function of primary ion species. ► Prediction of degree of fragmentation of sputtered molecules from different samples.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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