Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5362117 | Applied Surface Science | 2012 | 7 Pages |
Abstract
⺠Power dependency of secondary ion yield on sputtering yield. ⺠Yield enhancement per primary ion constituent decreases with increasing cluster size. ⺠Prediction of secondary ion yield enhancement as a function of primary ion species. ⺠Prediction of degree of fragmentation of sputtered molecules from different samples.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
A. Heile, C. Muhmann, D. Lipinsky, H.F. Arlinghaus,