| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5362118 | Applied Surface Science | 2012 | 8 Pages |
Abstract
⺠WSex films were obtained by PLD in vacuum and at various Ar gas pressures up to 10 Pa. ⺠The stoichiometric coefficient x was 1.3 in vacuum, and increased from 1.5 to 2.2 with Ar pressure rise from 2 to 10 Pa. ⺠TOF experiments were used to measure the energy distributions of W and Se atoms in vacuum. ⺠Collision Monte Carlo model was used to calculate the energy distributions of W and Se atoms in Ar gas. ⺠Influence of the buffer gas on the preferential sputtering of Se is revealed as a result of modeling.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
S.N. Grigoriev, V.Yu. Fominski, A.G. Gnedovets, R.I. Romanov,