| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5362204 | Applied Surface Science | 2012 | 10 Pages |
Abstract
⺠The Al nanopatterned surface was studied by a micro-spectroscopy combined photoemission electron microscopy. ⺠Fluorocarbons, e-beam exposed- and unexposed-polymethylmethacrylate (PMMA) residues from the nanofabrication were identified on the nanopatterns. ⺠The fluorocarbons influenced the chemical composition of the nanopatterns by forming AlF compounds before nitridation. ⺠In the PMMA residue-free area, the AlF compounds on the sidewalls were decomposed and transformed to AlN by nitridation. ⺠The PMMA residues between the individual nanopatterns were partially decomposed by nitridation.
Keywords
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Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
B. Qi, S. Ãlafsson, A.A. Zakharov, B. Agnarsson, H.P. Gislason, M. Göthelid,