Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5362223 | Applied Surface Science | 2012 | 4 Pages |
Abstract
⺠AlCdO films were deposited by rf magnetron sputtering with and without oxygen flow. ⺠For AlCdO films deposited with oxygen flow, we measure the high work function. ⺠For AlCdO films deposited without oxygen flow, we measure the low work function. ⺠It is shown the peroxidic AlCdO surface with a high work function.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Wei-Min Cho, Guan-Ru He, Ting-Hong Su, Yow-Jon Lin,