Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5362226 | Applied Surface Science | 2012 | 4 Pages |
Abstract
⺠Nano-diamond film is a suitable material to fabricate high performance electronic devices. ⺠Deposition process affects the microstructure and properties of nano-diamond film. ⺠Grain size and roughness of nano-diamond film decrease with the increase of carbon concentration.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Qingfeng Su, Weimin Shi, Dongmin Li, Jianming Lai, Liwen Jiang, Linjun Wang, Weizhong Ding, Yiben Xia,