Article ID Journal Published Year Pages File Type
5362248 Applied Surface Science 2012 7 Pages PDF
Abstract
► Ar ion is used to bombard tetrahedral amorphous carbon (ta-C) films. ► sp2 bonds and sp2 clustering of ta-C film are increased by the Ar ion bombardment. ► The soft top layer and the hard bulk are formed in the ta-C film bombarded by Ar ion. ► The multilayer thick ta-C film can be deposited.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
The deposition of a thick tetrahedral amorphous carbon film by argon ion bombardment
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