Article ID Journal Published Year Pages File Type
5362251 Applied Surface Science 2012 6 Pages PDF
Abstract
► Storing matter is a novel technique that avoids the matrix effect during SIMS analyses. ► Its efficacy is compared with traditional SIMS for a Boron-implanted silicon sample with native oxide at the surface. ► Improved intensity and concentration depth profiles are obtained.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Application of the storing matter technique to the analysis of boron doped and implanted SiO2/Si
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