Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5362367 | Applied Surface Science | 2008 | 4 Pages |
Abstract
Series of CoxCr1âx thin films have been evaporated under vacuum onto Si (1Â 0Â 0) and glass substrates. Chemical composition and interface properties have been studied by modelling Rutherford backscattering spectra (RBS) using SIMNRA programme. Thickness ranges from 17 to 220Â nm, and x from 0.80 to 0.88. Simulation of the energy spectra shows an interdiffusion profile in the thickest films, but no diffusion is seen in thinner ones. Microscopic characterizations of the films are done with X-ray diffraction (XRD) measurements. All the samples are polycrystalline, with an hcp structure and show a ã0Â 0Â 0Â 1ã preferred orientation. Atomic force microscopies (AFM) reveal very smooth film surfaces.
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Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
A. Kharmouche, I. Djouada,