Article ID Journal Published Year Pages File Type
5362473 Applied Surface Science 2012 4 Pages PDF
Abstract
► This paper deals with 60 keV argon ion induced evolution of ripple morphology on silicon surface at room temperature. ► A large angular window (0-75°), in terms of ion incident angle, was chosen for this study. ► Ripple formation in the angular window of 45°-75°. Ripple wavelength decreases with increasing incident angle. ► The results are attributed to the viscous flow mechanism.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Authors
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