| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5362474 | Applied Surface Science | 2012 | 5 Pages |
Abstract
⺠Nanostructure formation on InP surface at room temperature without substrate rotation by 100 keV argon ion. ⺠A large angular window (0-75°), in terms of ion incident angle, was studied. Dot formation in the angular window of 30-75°. ⺠RMS surface roughness, the dot size, and the dot height decreases with increasing angle of incidence. ⺠But dot density increases with increasing angle of incidence (for a particular fluence).
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Authors
Jyoti Ranjan Mohanty, Tanmoy Basu, D. Kanjilal, T. Som,