Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5362476 | Applied Surface Science | 2012 | 4 Pages |
Abstract
⺠Creation of nanodots by energetic ion. ⺠Nanodots are formed on GaAs surface by 50 keV Ar+ ion irradiation. ⺠Characterization using atomic force microscopy and micro-Raman spectroscopy is reported. ⺠Average dot size, density of dots and rms roughness varied are analyzed with fluence. ⺠Strain production and relaxation occurred with irradiation.
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Authors
Tanuj Kumar, S.A. Khan, U.B. Singh, S. Verma, D. Kanjilal,