Article ID Journal Published Year Pages File Type
5362476 Applied Surface Science 2012 4 Pages PDF
Abstract
► Creation of nanodots by energetic ion. ► Nanodots are formed on GaAs surface by 50 keV Ar+ ion irradiation. ► Characterization using atomic force microscopy and micro-Raman spectroscopy is reported. ► Average dot size, density of dots and rms roughness varied are analyzed with fluence. ► Strain production and relaxation occurred with irradiation.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Authors
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