Article ID Journal Published Year Pages File Type
5362484 Applied Surface Science 2012 4 Pages PDF
Abstract
► A proton beam writing set-up has been optimized for micro-patterning. ► Micro-channel and grating patterns are fabricated in PMMA, SU-8. ► Possible applications of the patterns are discussed.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Proton beam writing on PMMA and SU-8 films as a tool for development of micro-structures for organic electronics
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