Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5362766 | Applied Surface Science | 2012 | 5 Pages |
Abstract
⺠A detailed description of the fabrication process of the first-ever synchrotron hard X-ray Montel/nested elliptical KB mirror using a profile coating technique and flat Si substrates. ⺠Demonstrated excellent figure-precision of sub-nm rms height-error of profile-coated elliptical KB mirrors. ⺠Provided an economic solution of fabricating KB mirrors with a very precise elliptical surface profile at the small corner area of Montel optics for synchrotron hard X-rays.
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Authors
Chian Liu, G.E. Ice, W. Liu, L. Assoufid, J. Qian, B. Shi, R. Khachatryan, M. Wieczorek, P. Zschack, J.Z. Tischler,