Article ID Journal Published Year Pages File Type
5362766 Applied Surface Science 2012 5 Pages PDF
Abstract
► A detailed description of the fabrication process of the first-ever synchrotron hard X-ray Montel/nested elliptical KB mirror using a profile coating technique and flat Si substrates. ► Demonstrated excellent figure-precision of sub-nm rms height-error of profile-coated elliptical KB mirrors. ► Provided an economic solution of fabricating KB mirrors with a very precise elliptical surface profile at the small corner area of Montel optics for synchrotron hard X-rays.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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