Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5362893 | Applied Surface Science | 2011 | 9 Pages |
Abstract
⺠We studied the dependence of the deposition parameters on the controllable parameters for CNTs during CVD process. ⺠The deposition temperature and the deposition pressure show a decreasing trend with an increase of furnace temperature upto 1000 K. ⺠The deposition temperature decreases with reaction time. The deposition pressure is found to remain constant at the initial stage, and then decrease as time progresses. ⺠All deposition parameters show a decreasing trend with increase of volumetric flow rate. ⺠An experimental study was also conducted and the results were found to agree well with the theoretical predictions obtained.
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Authors
K. Raji, Shijo Thomas, C.B. Sobhan,