Article ID Journal Published Year Pages File Type
5362894 Applied Surface Science 2011 5 Pages PDF
Abstract
► A higher annealing temperature is required for NiSi formation on Si(1 1 0) substrate. ► Larger Ni2Si or NiSi grains form on Si(1 1 0) substrate. ► Characteristics of NiSi/n-Si(1 1 0) Schottky contacts are inferior to that of NiSi/n-Si(1 0 0) Schottky contacts.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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