Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5362922 | Applied Surface Science | 2011 | 6 Pages |
Abstract
⺠Structural characterization of Ni layer and Ni/Ti bilayer contacts on n-type 4H-SiC. ⺠Study of Ni-silicides and the redistribution of carbon, after annealing at 950 °C, in the Ni/SiC and the Ni/Ti/SiC contacts. ⺠Rutherford Backscattering Spectrometry (RBS) at Eα = 3.2 MeV. ⺠Nuclear reaction analysis (NRA) at Ed = 1 MeV. ⺠Scanning electron microscopy (SEM) and Energy Dispersive X-ray Spectrometry (EDS) techniques.
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Authors
M. Siad, M. Abdesselam, N. Souami, A.C. Chami,