Article ID Journal Published Year Pages File Type
5362944 Applied Surface Science 2011 7 Pages PDF
Abstract
► Preparation of nanocrystalline TiO2 thin films from a ceramic target by RF magnetron sputtering. ► The use of micro Raman spectroscopic analysis for the unambiguous presence of anatase and rutile phases in amorphous-like TiO2 films. ► Analysis of optical parameters of nanocrystalline films using the concept of quantum confinement effect. ► Study of PL spectra of pure TiO2 thin films and the effect of sputtering parameters on the PL spectra.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Effect of RF power and sputtering pressure on the structural and optical properties of TiO2 thin films prepared by RF magnetron sputtering
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