| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5362952 | Applied Surface Science | 2011 | 9 Pages |
Abstract
⺠This paper reports on a MEMS device that can be used to study sidewall stiction. ⺠Details on the design, fabrication, modeling and testing of the device are reported. ⺠The device is easy to fabricate and overcomes some of the limitations of other devices. ⺠The apparent adhesion energy of OTS SAM coated sidewalls is approximately 38 μJ/m2.
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Authors
N. Ansari, W.R. Ashurst,