Article ID Journal Published Year Pages File Type
5363110 Applied Surface Science 2013 7 Pages PDF
Abstract
► GZO films by p-DCMS with a cylindrical target were prepared at different powers. ► The film deposited at 2.0 kW showed the lowest resistivity and highest mobility. ► All films fulfilled the requirements for TCO regardless of the sputtering power.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Effect of sputtering power on the properties of ZnO:Ga transparent conductive oxide films deposited by pulsed DC magnetron sputtering with a rotating cylindrical target
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