Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5363111 | Applied Surface Science | 2013 | 5 Pages |
Abstract
⺠Study of direct and induced laser removal of SnO2:F using UV and IR ns laser sources. ⺠P1 grooves with good morphologic and electric properties obtained with all methods. ⺠Raman and EDX characterization of the structural changes in the heat affected zones. ⺠UV laser irradiation through the substrate is proposed as the best scribing method.
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Authors
D. Canteli, I. Torres, J.J. GarcÃa-Ballesteros, J. Cárabe, C. Molpeceres, J.J. GandÃa,