Article ID Journal Published Year Pages File Type
5363111 Applied Surface Science 2013 5 Pages PDF
Abstract
► Study of direct and induced laser removal of SnO2:F using UV and IR ns laser sources. ► P1 grooves with good morphologic and electric properties obtained with all methods. ► Raman and EDX characterization of the structural changes in the heat affected zones. ► UV laser irradiation through the substrate is proposed as the best scribing method.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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