Article ID Journal Published Year Pages File Type
5363391 Applied Surface Science 2011 4 Pages PDF
Abstract
► Direct current magnetron sputtering was adapted to prepare the 600 nm ITO films under different substrate temperatures. ► The mean infrared emissivity was measured in the heat-treatment process of heating and cooling from room temperature to 350 °C. ► Effect of the heat treatment on the infrared emissivity of indium tin oxide (ITO) films was investigated in detail. ► The emissivities of all films are below 0.3 in the whole heat treatment process.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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