| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5363398 | Applied Surface Science | 2011 | 7 Pages |
Abstract
⺠A large area Mo back contact for CIGS thin film solar cells was deposited using in-line DC sputtering system. ⺠In order to reduce its resistivity and improve the adhesion of Mo film with glass substrate, a bilayer Mo film was deposited. ⺠The first layer was formed at 12 mTorr for better adhesion and the second layer was formed at 3 mTorr for lower resistivity.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Zhao-Hui Li, Eou-Sik Cho, Sang Jik Kwon,