| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5363409 | Applied Surface Science | 2007 | 4 Pages |
Abstract
Electron emission from nano-patterned amorphous carbon is realized in this paper. The patterned carbon consists of islands with size of tens of nanometers, and is formed by etching uniform carbon film in oxygen plasma using a bismuth island-like film as the mask. Uniform and stable electron emission is reproducibly obtained, and the emission efficiency is above 2% at an anode voltage of 3Â kV. Small carbon particles between large islands are supposed to be necessary for stable electron emission.
Related Topics
Physical Sciences and Engineering
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Physical and Theoretical Chemistry
Authors
Zengmei Wang, Jian Wang, Dejie Li,