| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5363456 | Applied Surface Science | 2013 | 5 Pages |
Abstract
⺠We study hydrogenated amorphous Si/Ge superlattices annealed to form SiGe alloy. ⺠Annealing causes extensive blistering in hydrogenated samples. ⺠Blisters due to accumulation into bubbles of hydrogen released upon annealing. ⺠Hydrogen released more easily from Ge layers than from the Si ones. ⺠The amount of hydrogen in the bubbles is calculated.
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Physical and Theoretical Chemistry
Authors
C. Frigeri, M. Serényi, N.Q. Khánh, A. Csik, L. Nasi, Z. Erdélyi, D.L. Beke, H.-G. Boyen,