Article ID Journal Published Year Pages File Type
5363465 Applied Surface Science 2013 4 Pages PDF
Abstract
► Cl diffusion on Si(1 1 1) surface is investigated by first-principles calculations. ► Cl atom diffuses on the surface in a SiCl complex form. ► The activation energy and the diffusion path are very similar to the F case. ► The complex diffusion corresponds to the Si diffusion with carrying a halogen atom.
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Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
First-principles study of chlorine atom diffusion on Si(1 1 1)-5 × 5 reconstructed surfaces
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