Article ID Journal Published Year Pages File Type
5363481 Applied Surface Science 2013 5 Pages PDF
Abstract
► The founding is appearance of peculiar structures to Si(1 1 0) vicinal surface. ► Peculiar structures strongly influenced the use of Si(1 1 0) surface in MOS-FET. ► We proposed the plausible models of the peculiar structures.
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Authors
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