Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5363481 | Applied Surface Science | 2013 | 5 Pages |
Abstract
⺠The founding is appearance of peculiar structures to Si(1 1 0) vicinal surface. ⺠Peculiar structures strongly influenced the use of Si(1 1 0) surface in MOS-FET. ⺠We proposed the plausible models of the peculiar structures.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
M. Yamashita, Y. Nakamura, A. Yamamoto, J. Kikkawa, K. Izunome, A. Sakai,