| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5363624 | Applied Surface Science | 2011 | 5 Pages |
Abstract
⺠Hydrogenated nanocrystalline Si films were prepared by PECVD with an excitation frequency of 81.36 MHz. ⺠A modified four-layer-medium transmission model based on the envelope method was employed to determine optical constants of the obtained films. ⺠The samples prepared by very high frequency glow discharge have higher absorption coefficients due to their better compactness and lower defect density.
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Authors
Desheng Wang, Zhibo Yang, Fei Li, Deyan He,