UV lithography-based protein patterning on silicon: Towards the integration of bioactive surfaces and CMOS electronics

► Within the framework of our research activity on biosensors, we developed a methodology for obtaining CMOS-compatible biomolecule immobilization. ► We would like to point at the importance of studying the compatibility of bioactive surfaces with CMOS electronics. Such multidisciplinary investigation, involving the study of biochemical processes and electronic technologies, paves the way to the development of highly sensitive and compact biosensors. ► The purpose of our work is to give insights into the bidirectional interaction biosurface-chip: the effect of functionalization chemicals onto the CMOS backend is investigated and, at the same time, the influence of adhesion promoter (commonly used in CMOS technology) on the silane deposition is shown. ► This work is a first step towards complete CMOS-compatibility: biomolecule immobilization and washing techniques without ions dangerous for the CMOS are under investigation.