Article ID Journal Published Year Pages File Type
5363645 Applied Surface Science 2011 9 Pages PDF
Abstract
► Hexamethyldisiloxane (HMDSO) coatings on bell metal using RF-PACVD technique. ► Investigations of the films properties as a function of DC self-bias voltage. ► Impinging ion energy affects water repellency and protective behavior of the films. ► Correlation between impinging ion energy and deposited HMDSO film properties. ► Efficient use of HMDSO films for surface protection of bell metal using RF-PACVD.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
RF-PACVD of water repellent and protective HMDSO coatings on bell metal surfaces: Correlation between discharge parameters and film properties
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