Article ID Journal Published Year Pages File Type
5363676 Applied Surface Science 2011 6 Pages PDF
Abstract
► Near normal incidence ion erosion of Si results in two mode ripples. ► Ripples perpendicular to ion beam direction are inherently related to Fe addition. ► Ripples parallel to ion beam are less affected by Fe incorporation. ► Ripples parallel to ion beam become dominant at low ion energy (≤500 eV).
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Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
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Formation of two ripple modes on Si by ion erosion with simultaneous Fe incorporation
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