| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5363679 | Applied Surface Science | 2011 | 7 Pages |
Abstract
⺠Organic-inorganic composite microspheres with PS as a core and CeO2 nanoparticles as a shell were synthesized by in situ chemical precipitation. ⺠The shell thickness of the composite microspheres could be turned. The whole process required neither surface treatment for PS microspheres nor additional surfactant or stabilizer. ⺠A possible mechanism for the formation of PS/CeO2 composite microspheres was discussed. ⺠The effects of CeO2 shell thickness of the PS/CeO2 composite abrasives on oxide CMP performance were investigated.
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Authors
Yang Chen, Renwei Long,