Article ID Journal Published Year Pages File Type
5363682 Applied Surface Science 2011 6 Pages PDF
Abstract
► AlN thin films by reactive magnetron sputtering. ► Effects of geometry on SAW resonators. ► Effects of post-annealing on AlN film quality. ► Effects of post-annealing on SAW properties.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
The effect of geometry and post-annealing on surface acoustic wave characteristics of AlN thin films prepared by magnetron sputtering
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