Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5363800 | Applied Surface Science | 2007 | 6 Pages |
Abstract
A technique using 3Ï-method with a wide-frequency range from 0.5Â Hz to 0.5Â MHz was developed to determine simultaneously the thermal conductivities of individual layers in a two-layered structure. The technique utilizes 3Ï measurements in high and low frequency ranges separately. To evaluate the validity and accuracy of the technique, we performed measurements on a double-layered specimen consisting of a SiO2-film on a Si-substrate, and found that the measured conductivities of both the film and substrate agree well with literature values. Uncertainty analysis was given finally. This new technique overcomes a critical shortcoming of conventional techniques, which cannot measure the thermal conductivity of both film and substrate simultaneously.
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Authors
Zhao Liang Wang, Da Wei Tang, Xing Hua Zheng,