| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5363821 | Applied Surface Science | 2013 | 5 Pages |
Abstract
⺠BN films with different substrate roughness were analyzed by synchrotron X-rays. ⺠More cBN phase formed near the surface than substrate in the as-deposited film. ⺠With substrate roughness increase, more hBN phase formed in the film. ⺠Synchrotron-based GI-XRD and XRR are powerful tools for characterizing BN films.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
X.M. Zhang, W. Wen, X.L. Li, Q. He, X.T. Zhou,