Article ID Journal Published Year Pages File Type
5363852 Applied Surface Science 2013 5 Pages PDF
Abstract
► A new approach for texturing uniform pyramid structures using silicon nitride. ► Silicon nitride of varying thicknesses, resulting in various pyramid structures. ► Uniform and higher surface coverage of pyramids possess the lower average reflectivity.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Key technique for texturing a uniform pyramid structure with a layer of silicon nitride on monocrystalline silicon wafer
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