| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5363882 | Applied Surface Science | 2013 | 5 Pages |
Abstract
⺠The RF power play an important role in ZnO films during the growth process. ⺠Films deposited at 150 W showed the best crystalline and optical properties. ⺠The mechanism can be explained by a qualitative model and dynamics equations.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Ya-Jun Zhao, Da-Yong Jiang, Man Zhao, Rui Deng, Jie-Ming Qin, Shang Gao, Qing-Cheng Liang, Jian-Xun Zhao,