| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5363942 | Applied Surface Science | 2008 | 6 Pages |
Abstract
In this paper, we summarize how the introduction of in-line TXRF monitoring provides detailed analytical information on aluminum, titanium and molybdenum contamination levels in order to improve several process steps from front-end processing, minimize product yield loss and make it possible to successfully manufacture multiple products and process geometries in the same fabrication platform.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Thanas Budri,