Article ID Journal Published Year Pages File Type
5363983 Applied Surface Science 2011 4 Pages PDF
Abstract
► a-Si films were prepared with polycrystalline and monocrystalline silicon target. ► The structural, optical and electrical properties of the films are studied. ► Polycrystalline silicon target is superior to monocrystalline one.
Keywords
Related Topics
Physical Sciences and Engineering Chemistry Physical and Theoretical Chemistry
Preview
Structural, optical and electrical properties of amorphous silicon thin films prepared by sputtering with different targets
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