| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5364093 | Applied Surface Science | 2009 | 6 Pages |
Abstract
As an illustration, a Ti(CxN1âx) based multilayer deposited on a hardmetal substrate was investigated. This quantification method was successfully used to evidence three different layers and the diffusion phenomenon at the interfaces between the layers. This study was completed with a quantitative SIMS depth profile that the high sensitivity and depth resolution allowed to measure the small variations of composition lower than the uncertainty of AES.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
J. Guillot, T. Wirtz, T. Girot, M. Penoy, H.N. Migeon, G. Barbier,