Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5364480 | Applied Surface Science | 2009 | 5 Pages |
ã1Â 1Â 1ã-oriented Pb(Zr0.6Ti0.4)O3 thin films were elaborated in the same run by RF multitarget sputtering on Si/SiO2/TiO2/Pt(1Â 1Â 1) and LaAlO3/Pt(1Â 1Â 1) substrates. PZT thin films were textured, exhibiting ã1Â 1Â 1ã fibre texture on silicon substrates whereas epitaxial relationships were found when grown on LaAlO3/Pt(1Â 1Â 1). On the latter substrate, values of spontaneous polarization and of dielectric permittivity were measured close to that calculated previously along the ã1Â 1Â 1ã direction of PZT rhombohedral single crystal. On the contrary, spontaneous polarization and dielectric permittivity measured on PZT thin films deposited on platinized silicon were found deviating from calculated values. These different electrical results are attributed to different ferroelectric domain configurations.