| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5364523 | Applied Surface Science | 2012 | 8 Pages |
Abstract
⺠Focusing a femtosecond laser beam with dual axicon optics to the vacuum chamber was demonstrated. ⺠786 and 393 nm of the wavelength focused on the c-Si in the vacuum formed a hole with submicron-meter scale. ⺠Irradiation of 786 nm wavelength formed humps and swells on a scale of â¼100 nm, leading to the periodical ripple pattern. ⺠The 393 nm laser irradiation created the regular rippled pattern with the spatial period of 60 nm.
Related Topics
Physical Sciences and Engineering
Chemistry
Physical and Theoretical Chemistry
Authors
Go Odachi, Kento Hara, Ryosuke Sakamoto, Takashi Yagi,