| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5364564 | Applied Surface Science | 2012 | 7 Pages |
In this study, a novel combination approach is used to prepare TaNbTiW multi-element alloy films. The composition, microstructure and mechanical properties of the alloy films are investigated. X-ray diffraction (XRD) shows that the films have bcc structure, and the lattice constant strongly depends on film composition. The films have residual stress in the range of â0.1 to â2.63 GPa. Their hardness and modulus attain to the values about 5.2 and 127.2 GPa, respectively. After annealed at 500 °C and 700 °C for 90 min in vacuum, the films reveal no phase transformation.
⺠Multi-element alloy films were deposited by a novel combination approach. ⺠Alloy films are the single phase solid solution with the bcc structure. ⺠Structure and property of alloy film strongly depend on the film composition. ⺠Maximum hardness and elastic modulus of alloy films reached 5.2 and 127.2 GPa.
