Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
5364644 | Applied Surface Science | 2008 | 5 Pages |
Abstract
Interaction of a nanosecond transversely excited atmospheric (TEA) CO2 laser, operating at 10.6 μm, with tungsten-titanium thin film (190 nm) deposited on silicon of n-type (1 0 0) orientation, was studied. Multi-pulse irradiation was performed in air atmosphere with laser energy densities in the range 24-49 J/cm2. The energy absorbed from the laser beam was mainly converted to thermal energy, which generated a series of effects. The following morphological changes were observed: (i) partial ablation/exfoliation of the WTi thin film, (ii) partial modification of the silicon substrate with formation of polygonal grains, (iii) appearance of hydrodynamic features including nano-globules. Torch-like plumes started appearing in front of the target after several laser pulses.
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Authors
S. PetroviÄ, B. GakoviÄ, D. PeruÅ¡ko, M. Trtica, B. Radak, P. Panjan, Å . MiljaniÄ,