| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 5364764 | Applied Surface Science | 2010 | 5 Pages |
Abstract
Diamond-like carbon (DLC) films deposited on different substrates by plasma enhanced chemical vapour deposition were investigated. Bonding states and film quality were characterized by FT-IR spectroscopy. The influence of the power of plasma and the deposition time on the sp2/sp3 ratio as well as the concentration of CHn bonds was studied. The influence of sp2/sp3 ratio on the formation process of conducting channels in diamond-like carbon films as a result of electrical breakdown was determined. Reproducible increase of diamond-like carbon film conductivity, with initial sp2/sp3 ratio larger than 0.16, was observed after electrical breakdown.
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Authors
M. Semenenko, G. Okrepka, O. Yilmazoglu, H.L. Hartnagel, D. Pavlidis,